GREEN OPTICS

Measuring Equipment Specifications	Interferometer : flat / cylinder / curvature measurement (CX ≤ 700, CC ≤ 1000) – RMS Simple Repeatability <0.06nm, λ/10,000(2σ) – RMS Wavefront Repeatability <0.35nm, λ/1,800(mean + 2σ) – Peak Pixel Deviation < 0.5nm, λ/1,200(99.5%) – Pupil Focus Range 4inch Three-dimensional measuring devices: measurement of parallelism/floor plan/squareness/ roundness – Resolution(um) : Standard 0.5, High Accuracy 0.1 – Maximum Permissible : Standard 3.5+L/300, 3.5, High Accuracy 3.0+L/300, 3.0 Prism Master: angle measurement – Electronic autocollimator : EFL 300 mm, Diameter 57mm – Accuracy of the autocollimator : Resolution 0.01; Repeatability ±0.1 Surface roughness measurement: surface roughness measurement (Ra) – 10x, 50x, 100x Measurable – Vertical Scan Range – 150um, Extended scan range to 20mm – Vertical Resolution < 0.1mm – Lateral Resolution 0.36 to 9.50 um – RMS Repeatability <0.01nm Spectrometers: measurement of transmittance / reflectance (absolute reflection) / absorbance – Wavelength range 190 ~ 2800nm / 250 ~ 2500nm (with Auto Polarizer) – Transmittance 0 to 85 degrees – Reflectivity 5 to 85 degrees – Measurement error (10 times in case of repeating measurement) <0.1% Mahr LD260: Measurement of plane / aspherical surface / cylinder / shape and roughness – Probe measurement range (1) 13mm (100mm probe arm) (2) 26 mm (200mm probe arm) – Drive X axis uncertainty: ±0.2*L.1000) um – Measurement time: 5 ~ 10 min – Measuring range / Resolution (Z-axis) 13mm/0.8nm – Measuring range / Resolution (X-axis) 0.1-260mm/0.8nm – Minimum measuring distance (X axis) 0.05-30um – Positioning accuracy: 0.1um ASI: Measurement of plane /aspherical surface/curvature (CX550 / CX700) – Repeatability ≤ 10nm (λ/60)rms – Reproducibility ≤ 20nm (λ/30)rms – Accuracy ≤ 30nm (λ/20)rms – Diameter ≤ 300mm can be measured

Measuring Equipment Specifications

Interferometer : flat / cylinder / curvature measurement (CX ≤ 700, CC ≤ 1000)
– RMS Simple Repeatability <0.06nm, λ/10,000(2σ)
– RMS Wavefront Repeatability <0.35nm, λ/1,800(mean + 2σ)
– Peak Pixel Deviation < 0.5nm, λ/1,200(99.5%)
– Pupil Focus Range 4inch
Three-dimensional measuring devices: measurement of parallelism/floor plan/squareness/ roundness
– Resolution(um) : Standard 0.5, High Accuracy 0.1
– Maximum Permissible : Standard 3.5+L/300, 3.5, High Accuracy 3.0+L/300, 3.0
Prism Master: angle measurement
– Electronic autocollimator : EFL 300 mm, Diameter 57mm
– Accuracy of the autocollimator : Resolution 0.01; Repeatability ±0.1
Surface roughness measurement: surface roughness measurement (Ra)
– 10x, 50x, 100x Measurable
– Vertical Scan Range
– 150um, Extended scan range to 20mm
– Vertical Resolution < 0.1mm
– Lateral Resolution 0.36 to 9.50 um
– RMS Repeatability <0.01nm
Spectrometers: measurement of transmittance / reflectance (absolute reflection) / absorbance
– Wavelength range 190 ~ 2800nm / 250 ~ 2500nm (with Auto Polarizer)
– Transmittance 0 to 85 degrees
– Reflectivity 5 to 85 degrees
– Measurement error (10 times in case of repeating measurement) <0.1%
Mahr LD260: Measurement of plane / aspherical surface / cylinder / shape and roughness
– Probe measurement range
   (1) 13mm (100mm probe arm)
   (2) 26 mm (200mm probe arm)
  – Drive X axis uncertainty: ±0.2*L.1000) um
  – Measurement time: 5 ~ 10 min
  – Measuring range / Resolution (Z-axis) 13mm/0.8nm
  – Measuring range / Resolution (X-axis) 0.1-260mm/0.8nm
  – Minimum measuring distance (X axis) 0.05-30um
  – Positioning accuracy: 0.1um
ASI: Measurement of plane /aspherical surface/curvature (CX550 / CX700)
– Repeatability ≤ 10nm (λ/60)rms
– Reproducibility ≤ 20nm (λ/30)rms
– Accuracy ≤ 30nm (λ/20)rms
– Diameter ≤ 300mm can be measured

Product Photos

<CMM>	<interferometer>	<Toolmakers Microscope>
<MarSurf LD260>	<Optical spectrometer>	<Shack-Hartmann Sensor>
<Surface roughness measurement>	<프리즘마스터>

Module

Component

Technology

Developent Result

Company Introduction

Company information