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Measuring Equipment Specifications

Interferometer
  • Capabilities: Flat, cylindrical, and curvature measurement (CX ≤ 700, CC ≤ 1000)
  • RMS Simple Repeatability: < 0.06 nm, λ/10,000 (2σ)
  • RMS Wavefront Repeatability: < 0.35 nm, λ/1,800 (mean + 2σ)
  • Peak Pixel Deviation: < 0.5 nm, λ/1,200 (99.5%)
  • Pupil Focus Range: 4 inches
Three-Dimensional Measuring Devices
  • Measurement Capabilities:
    Parallelism, floor plan, squareness, and roundness
  • Resolution:
    - Standard: 0.5 μm
    - High Accuracy: 0.1 μm
  • Maximum Permissible:
    - Standard: 3.5 + L/300, 3.5
    - High Accuracy: 3.0 + L/300, 3.0
Prism Master
  • Angle Measurement:
    - Electronic Autocollimator: EFL 300 mm, Diameter 57 mm
    - Accuracy:
      Resolution: 0.01
      Repeatability: ±0.1
Surface Roughness Measurement
  • Measurement Capabilities: Surface roughness (Ra)
  • Magnifications Available: 10x, 50x, 100x
  • Vertical Scan Range: 150 μm, extended scan range up to 20 mm
  • Vertical Resolution: < 0.1 μm
  • Lateral Resolution: 0.36 to 9.50 μm
  • RMS Repeatability: < 0.01 nm
Spectrometers
  • Measurement Capabilities: Transmittance, reflectance (absolute reflection), and absorbance
  • Wavelength Range: 190 ~ 2800 nm / 250 ~ 2500 nm (with Auto Polarizer)
  • Transmittance Measurement Angle: 0 to 85 degrees
  • Reflectivity Measurement Angle: 5 to 85 degrees
  • Measurement Error: < 0.1% (based on 10 repetitions)
Mahr LD260
  • Measurement Capabilities: Plane, aspherical surface, cylinder, shape, and roughness
  • Probe Measurement Range:
    - (1) 13 mm (100 mm probe arm) - (2) 26 mm (200 mm probe arm)
  • Drive X-Axis Uncertainty: ±0.2*L/1000 μm
  • Measurement Time: 5 ~ 10 minutes
  • Measuring Range / Resolution (Z-axis): 13 mm / 0.8 nm
  • Measuring Range / Resolution (X-axis): 0.1-260 mm / 0.8 nm
  • Minimum Measuring Distance (X-axis): 0.05-30 μm
  • Positioning Accuracy: 0.1 μm
ASI
  • Measurement Capabilities: Plane, aspherical surface, and curvature (CX550 / CX700)
  • Repeatability: ≤ 10 nm (λ/60) rms
  • Reproducibility: ≤ 20 nm (λ/30) rms
  • Accuracy: ≤ 30 nm (λ/20) rms
  • Maximum Diameter Measured: ≤ 300 mm
Product Photos

<CMM>

Aspherical lens

<interferometer>

Cylindrical lens

<Toolmakers Microscope>

Doublet lens

<Optical spectrometer>

FLIR Camera lens

<Shack-Hartmann Sensor>

Grating lens

<Surface roughness measurement>

Semicconductor Lithography lens

<Prism Master>