Measuring Equipment Specifications
Interferometer
- Capabilities: Flat, cylindrical, and curvature measurement (CX ≤ 700, CC ≤ 1000)
- RMS Simple Repeatability: < 0.06 nm, λ/10,000 (2σ)
- RMS Wavefront Repeatability: < 0.35 nm, λ/1,800 (mean + 2σ)
- Peak Pixel Deviation: < 0.5 nm, λ/1,200 (99.5%)
- Pupil Focus Range: 4 inches
Three-Dimensional Measuring Devices
-
Measurement Capabilities:
Parallelism, floor plan, squareness, and roundness -
Resolution:
- Standard: 0.5 μm
- High Accuracy: 0.1 μm -
Maximum Permissible:
- Standard: 3.5 + L/300, 3.5
- High Accuracy: 3.0 + L/300, 3.0
Prism Master
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Angle Measurement:
- Electronic Autocollimator: EFL 300 mm, Diameter 57 mm
- Accuracy:
Resolution: 0.01
Repeatability: ±0.1
Surface Roughness Measurement
- Measurement Capabilities: Surface roughness (Ra)
- Magnifications Available: 10x, 50x, 100x
- Vertical Scan Range: 150 μm, extended scan range up to 20 mm
- Vertical Resolution: < 0.1 μm
- Lateral Resolution: 0.36 to 9.50 μm
- RMS Repeatability: < 0.01 nm
Spectrometers
- Measurement Capabilities: Transmittance, reflectance (absolute reflection), and absorbance
- Wavelength Range: 190 ~ 2800 nm / 250 ~ 2500 nm (with Auto Polarizer)
- Transmittance Measurement Angle: 0 to 85 degrees
- Reflectivity Measurement Angle: 5 to 85 degrees
- Measurement Error: < 0.1% (based on 10 repetitions)
Mahr LD260
- Measurement Capabilities: Plane, aspherical surface, cylinder, shape, and roughness
- Probe Measurement Range:
- (1) 13 mm (100 mm probe arm) - (2) 26 mm (200 mm probe arm) - Drive X-Axis Uncertainty: ±0.2*L/1000 μm
- Measurement Time: 5 ~ 10 minutes
- Measuring Range / Resolution (Z-axis): 13 mm / 0.8 nm
- Measuring Range / Resolution (X-axis): 0.1-260 mm / 0.8 nm
- Minimum Measuring Distance (X-axis): 0.05-30 μm
- Positioning Accuracy: 0.1 μm
ASI
- Measurement Capabilities: Plane, aspherical surface, and curvature (CX550 / CX700)
- Repeatability: ≤ 10 nm (λ/60) rms
- Reproducibility: ≤ 20 nm (λ/30) rms
- Accuracy: ≤ 30 nm (λ/20) rms
- Maximum Diameter Measured: ≤ 300 mm
Product Photos
![]() <CMM> |
![]() <interferometer> |
![]() <Toolmakers Microscope> |
![]() <Optical spectrometer> |
![]() <Shack-Hartmann Sensor> |
![]() <Surface roughness measurement> |
![]() <Prism Master> |